Instrument name |
Electron Beam Evaporator |
Model |
PVD75 |
Manufacturer |
KURT J.LESKER COMPANY |
Specifications |
1. Platen Size: Up to 12 (305 mm) diameter 2. Electron Gun Power: 5-10 KW 3. Ultimate Vacuum: 5×10-5 Pa 4. Pump Speed: 3*10-4 Pa/20 min 5. Heating : 350℃ 6. Temperature Uniformity: ±10℃ 7. Rotation: Variable up to 20 RPM 8. Crucible Number: 4 9. Coating uniformity: ±5%（Al） 10. System Control: PC+PLC control |
Function and applications |
Electron beam evaporator is a universal metal coating machine, used for depositing of single-layer or multi-layer metal film. It could be mainly used for the metal electrodes preparation in the field of nano-device and organic photoelectric device, and also for growth catalyst film layer. |
Accessories |
Mechanical Pump |
Contacts: Wenchang Zhu |
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Contact number:65881259 |
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E-mail: wczhu@suda.edu.cn |
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Editor: Wenchang Zhu